Thermal treatment equipment, thermal treatment method and...

Details Thermal treatment equipment, thermal treatment method and... Thermal treatment equipment, thermal treatment method and...

2006-09-19

2006-09-19

Campbell, Thor S. (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C219S390000, C118S724000

Reexamination Certificate

active

07110665

ABSTRACT:
In an apparatus for performing heating treatment of a structure composed of a substrate and a structure arranged on the front surface of the substrate, the latter structure having thermal capacity smaller than that of the substrate, heaters are arranged to be opposed to the front surface and the back surface of the substrate. A cooling body is arranged at a position opposed to the back surface of the substrate to sandwich the heater of the back surface between the cooling body and the substrate.

REFERENCES:
patent: 5167717 (1992-12-01), Boitnott
patent: 6858087 (2005-02-01), Hori et al.
patent: 2000-251716 (2000-09-01), None

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