Pumps – By heating of pumped fluid
Patent
1996-07-25
1999-02-16
Mohanty, Bibhu
Pumps
By heating of pumped fluid
417244, F04B 1924, F04B 300
Patent
active
058713360
ABSTRACT:
A micro-machined vacuum pump is provided which may be utilized with microsensors. The pump in accordance with the present invention is preferably fabricated within a semiconductor substrate and utilizes thermal transpiration to provide compression. The pump has a plurality of flow chambers and a plurality of flow tubes to interconnect the flow chambers. The pump additionally includes means for creating a temperature differential between a first end and a second end of each flow tube to draw the gas therethrough. Drawing the gas through the flow tube increases the pressure within an adjacent flow chamber and induces a pumping action.
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Mohanty Bibhu
Northrop Grumman Corporation
Sutcliff Walter G.
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