Thermal test chamber device

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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324158P, G01R 3500, G01R 3126

Patent

active

049623559

ABSTRACT:
A thermal test chamber device is provided that includes two half housing tions that are secured together to define a chamber there between with a window for viewing inside the chamber and with an inlet and an outlet for supplying and exhausting a medium to and from the chamber. The lower half housing section has an electrical circuit mounted relative thereto for testing a semiconductor chip specimen when presented relative thereto.

REFERENCES:
patent: 3710251 (1973-01-01), Hagge et al.
patent: 3979671 (1976-04-01), Meeker et al.
patent: 4607220 (1986-08-01), Hollman
patent: 4787752 (1988-11-01), Fraser et al.
patent: 4791364 (1988-12-01), Kufis et al.
patent: 4812750 (1989-03-01), Keel et al.

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