Thermal sensor and method of making same

Details Thermal sensor and method of making same Thermal sensor and method of making same

1999-09-13

2000-11-07

Easthom, Karl D.

Electrical resistors

Resistance value responsive to a condition

Photoconductive

338 18, 338 17, 257467, H01L 3108

Patent

active

061442852

ABSTRACT:
A two level microbridge infrared thermal detector having an upper detector planar section (a) comprising a temperature responsive detector of an oxide of vanadium having a high TCR and a resistivity in the range of 20K ohms to 50K ohms per square sheet resistance, and (b) being supported above a lower section by leg portions of an oxide of vanadium having a resistivity of approximately 500 ohms per square sheet resistance.

REFERENCES:
patent: Re36136 (1999-03-01), Higashi et al.
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patent: 5286976 (1994-02-01), Cole
patent: 5300915 (1994-04-01), Higashi et al.
patent: 5399897 (1995-03-01), Cunningham et al.
patent: 5450053 (1995-09-01), Wood
patent: 5900799 (1999-05-01), Morris
patent: 5939971 (1999-08-01), Yong
Article "Characterization of Expitaxially Grown Films of Vanadium Oxides", K.D. Rogers, J.A. Coath, M.C.Lovell, Cranfield Institute of Technology (RMCS), Shrivenham, Swindon, Wwiltshire, SN6 8LA, England, Received Jan. 21, 1991; accepted for publication May 1, 1991.

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