Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate
2005-05-03
2005-05-03
Fuqua, Shawntina (Department: 3742)
Electric resistance heating devices
Heating devices
Radiant heater
C392S416000, C219S390000, C219S405000, C219S411000
Reexamination Certificate
active
06889004
ABSTRACT:
A thermal processing system for heating a to-be-processed object while rotating the to-be-processed object by a placement part, and for performing thermal processing on the to-be-processed object by supplying a predetermined gas into a processing chamber. An outer ring part provided outside the processing chamber and an inner ring part provided inside the processing chamber have pluralities of circumferentially arranged magnetic poles. The magnetic poles apply magnetic forces between the outer ring part and inner ring part so that the inner ring part will follow the rotation of the outer ring part. The number of magnetic poles of the outer ring part and inner ring part are selected to achieve an allowable angular error when between the outer ring part and inner ring part during rotation.
REFERENCES:
patent: 5376862 (1994-12-01), Stevens
patent: 5482602 (1996-01-01), Cooper et al.
patent: 5840125 (1998-11-01), Gibbons et al.
patent: 5902185 (1999-05-01), Kubiak et al.
patent: 5982986 (1999-11-01), Davenport
Crowell & Moring LLP
Fuqua Shawntina
Tokyo Electron Limited
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