Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2005-05-10
2005-05-10
Fuqua, Shawntina (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S501000
Reexamination Certificate
active
06891131
ABSTRACT:
A thermal processing system performs predetermined thermal processing on an approximately circular to-be-processed object, by applying radiant heat to the to-be-processed object by means of a heating lamp system. The heating lamp system comprises a plurality of lamps disposed concentrically so as to correspond to the to-be-processed object. The plurality of lamps are controlled individually for respective zones of the to-be-processed object.
REFERENCES:
patent: 5332442 (1994-07-01), Kubodera et al.
patent: 6002109 (1999-12-01), Johnsgard et al.
patent: 6156079 (2000-12-01), Ho et al.
patent: 60-727 (1985-01-01), None
patent: 61-86935 (1986-06-01), None
patent: 61-198735 (1986-09-01), None
patent: 64-11324 (1989-01-01), None
patent: 64-011324 (1989-01-01), None
patent: 1-296615 (1989-11-01), None
patent: 3-210784 (1991-09-01), None
patent: 7-58189 (1995-03-01), None
patent: 11-8204 (1999-01-01), None
patent: 2000-91257 (2000-03-01), None
Li Yicheng
Sakuma Takeshi
Shigeoka Takashi
Crowell & Moring LLP
Fuqua Shawntina
Tokyo Electron Limited
LandOfFree
Thermal processing system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Thermal processing system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermal processing system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3377183