Thermal processing system

Electric heating – Heating devices – Combined with container – enclosure – or support for material...

Reexamination Certificate

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Details

C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S501000

Reexamination Certificate

active

06891131

ABSTRACT:
A thermal processing system performs predetermined thermal processing on an approximately circular to-be-processed object, by applying radiant heat to the to-be-processed object by means of a heating lamp system. The heating lamp system comprises a plurality of lamps disposed concentrically so as to correspond to the to-be-processed object. The plurality of lamps are controlled individually for respective zones of the to-be-processed object.

REFERENCES:
patent: 5332442 (1994-07-01), Kubodera et al.
patent: 6002109 (1999-12-01), Johnsgard et al.
patent: 6156079 (2000-12-01), Ho et al.
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patent: 61-198735 (1986-09-01), None
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patent: 64-011324 (1989-01-01), None
patent: 1-296615 (1989-11-01), None
patent: 3-210784 (1991-09-01), None
patent: 7-58189 (1995-03-01), None
patent: 11-8204 (1999-01-01), None
patent: 2000-91257 (2000-03-01), None

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