Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
Patent
1992-01-28
1993-09-28
Yuen, Henry C.
Heating
Processes of heating or heater operation
Including preparing or arranging work for heating
432152, 432253, F27D 500, F27B 904
Patent
active
052482537
ABSTRACT:
A tube furnace used for high-temperature processing of semiconductor wafers or the like employs features to improve the gas flow. A primary feature of this invention is improving the plug flow characteristics of the furnace by preventing the undesirable elongation of the gas jet entering the reaction system through the injector nozzle. This elongated gas jet induces unwanted turbulence within the system and causes premature and incomplete mixing of reactant gases in the longitudinal direction. Improvement in plug flow characteristics is attained by use of a quartz baffle at the entrance region of the reactor located a distance from the gas inlet. The shape and location of the baffle are such that it acts as a physical barrier against the elongated gas jet and confines the turbulence in the initial fill chamber created by the entrance region of the reactor and the baffle.
REFERENCES:
patent: 3338209 (1967-08-01), Bhola
patent: 4347431 (1982-08-01), Pearce et al.
patent: 4459104 (1984-07-01), Wollmann
patent: 4526534 (1985-07-01), Wollmann
patent: 4543059 (1985-09-01), Whang et al.
patent: 4732110 (1988-03-01), Parsons
patent: 4979897 (1990-12-01), Yates
patent: 4992044 (1991-02-01), Philipossian
patent: 5024599 (1991-06-01), Chhabra
patent: 5064367 (1991-11-01), Philipossian
patent: 5135391 (1992-08-01), Chhabra
Culley Edward W.
Philipossian Ara
Digital Equipment Corporation
Yuen Henry C.
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