Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1994-11-08
1996-04-09
Lateef, Marvin M.
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
118 501, 118725, F27B 514, F27D 1100
Patent
active
055063896
ABSTRACT:
A thermal processing furnace provided with a helical-shaped heating resistance element along an inner wall surface of a cylindrical insulating member, wherein support members support the heating resistance element that has been divided into a plurality of parts in an axial direction of the insulating member. Each of the support members is formed of a plurality of support pieces that extend in a radially outward direction with respect to the furnace and at a pitch corresponding to that of the heating resistance element, on a base portion positioned on an inner side of the heating resistance element, and tip portions of the support pieces are embedded in the insulating member. Since this enables a simplification of the structure, it is possible to improve the practicability of the process and reduce the fabrication time, with a simple fabrication design, and it is also possible to improve the accuracy of the pitch at which the heating resistance element is arrayed.
REFERENCES:
patent: 5095192 (1992-03-01), McEntire
patent: 5187771 (1993-02-01), Uchida
patent: 5229576 (1993-07-01), Nakao et al.
Hidano Masaru
Miura Yasuaki
Yokokawa Osamu
Lateef Marvin M.
Pelham J.
Tokyo Electron Kabushiki Kaisha
Tokyo Electron Tohoku Kabushiki Kaisha
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