Data processing: measuring – calibrating – or testing – Calibration or correction system – Temperature
Reexamination Certificate
2007-05-29
2007-05-29
Barlow, John (Department: 2863)
Data processing: measuring, calibrating, or testing
Calibration or correction system
Temperature
C702S085000
Reexamination Certificate
active
11214616
ABSTRACT:
The invention relates to a method for calibrating thermal processing equipment used for heat treatment of a multilayer substrate, in particular a multilayer semiconductor substrate. A calibration test profile is determined by processing a calibration test substrate according to thermal process parameters that produce multilayer substrates having an even thickness profile, and/or having reduced slip lines and/or reduced wafer deformation, and/or having other desired and predetermined properties. Then a particular thermal processing equipment is calibrated by determining thermal process parameters for that equipment so that a test substrate processed with these parameters will have the determined calibration test profile.
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Barlow John
S.O.I.Tec Silicon on Insulator Technologies S.A.
Washburn Douglas N
Winston & Strawn LLP
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