Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate
2005-04-26
2005-04-26
Fuqua, Shawntina (Department: 3742)
Electric resistance heating devices
Heating devices
Radiant heater
C392S418000, C219S390000, C219S405000, C219S411000, C118S724000, C118S725000, C118S050100
Reexamination Certificate
active
06885815
ABSTRACT:
A plurality of flash lamps are covered with a reflector. Optical fiber members are attached to the reflector on portions located immediately above the flash lamps. When the flash lamps emit flash light toward a semiconductor wafer, the optical fiber members partially guide the emitted light so that a CCD measures the intensity of light emitted from each of the plurality of flash lamps. A computer detects the emission state of each of the plurality of flash lamps on the basis of a result of measurement. At this time, the computer compares standard luminous intensity obtained when the irradiation state on the semiconductor wafer satisfies a prescribed criterion with the luminous intensity in actual processing for detecting the emission states of the plurality of flash lamps. Thus provided is a thermal processing apparatus capable of reliably and simply detecting deterioration of lamps.
REFERENCES:
patent: 4525380 (1985-06-01), Arai et al.
patent: 4649261 (1987-03-01), Sheets
patent: 57-162340 (1982-10-01), None
patent: 59-169125 (1984-09-01), None
patent: 60-258928 (1985-12-01), None
patent: 63-166219 (1988-07-01), None
patent: 11-135449 (1999-05-01), None
English translation of portion of Japanese Patent Application Laid-Open No. 11-135449 relevant to the instant application.
English translation of portion of Japanese Patent Application Laid-Open No. 63-166219 relevant to the instant application.
English translation of portion of Japanese Patent Application Laid-Open No. 57-162340 relevant to the instant application.
Ikumi Yuko
Kusuda Tatsufumi
Dainippon Screen Mfg. Co,. Ltd.
Fuqua Shawntina
Ostrolenk Faber Gerb & Soffen, LLP
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