Thermal processing apparatus having a reaction tube with transpa

Details Thermal processing apparatus having a reaction tube with transpa Thermal processing apparatus having a reaction tube with transpa

1997-05-01

1999-01-19

Walberg, Teresa

Electric resistance heating devices

Heating devices

Radiant heater

219390, 219405, 118725, F27B 514, H01L 21324

Patent

active

058623027

ABSTRACT:
A heat insulating member is disposed, enclosing a reaction tube, and a heat source is provided through a heat linearing member disposed above the reaction tube and between the reaction tube and the heat insulating member. The reaction tube is made of quartz and has a transparent portion formed in the top thereof and its neighboring thereof, and an opaque portion in the rest part of the reaction tube. In a heat treatment, when heat rays are radiated from the heat source through the heat linearing member, the heat rays pass through the transparent portion of the reaction tube to heat a wafer, but those of the heat rays reflected on the heat insulating member are blocked by the opaque portion of the reaction tube. A heat ray quantity to be passed into the reaction tube can be controlled, whereby high intra-surface temperature uniformity of the wafer can be secured, and as a result high processing yields can be obtained.

REFERENCES:
patent: 5429498 (1995-07-01), Okase et al.

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