Thermal processing apparatus

Details Thermal processing apparatus Thermal processing apparatus

2011-07-12

2011-07-12

Robinson, Daniel (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C219S405000, C118S724000

Reexamination Certificate

active

07978963

ABSTRACT:
The present invention provides a thermal processing apparatus that conducts a thermal process such as an annealing process at a temperature of 400° C. or more to an object to be processed. The apparatus is provided with a processing vessel (4) having a transmitting window (8) in a top part thereof. A table (10) is disposed in the vessel, that supports thereon the object (W) opposed to the transmitting window. A plurality of heating lamps (42A,42B) are disposed above the processing vessel, that heat the object by irradiating heat rays to the object through the transmitting window. A thermoelectric converter (24) is disposed on the table and configured to at least cool the object. When a temperature of the object is increased, the object is mainly heated by the heat rays from the heating lamps. When the temperature of the object is decreased, the object is forcibly cooled by means of the thermoelectric converter.

REFERENCES:
patent: 6403924 (2002-06-01), Hayashi
patent: 7107929 (2006-09-01), Horsky et al.
patent: 7274867 (2007-09-01), Peukert
patent: 7846255 (2010-12-01), Yoneda et al.
patent: 2003/0080104 (2003-05-01), Kusuda
patent: 2003/0089132 (2003-05-01), Kusuda
patent: 2008/0226272 (2008-09-01), Kasai et al.
patent: 2010/0150534 (2010-06-01), Kasai
patent: 62-15816 (1987-01-01), None
patent: 04-010410 (1992-01-01), None
patent: 06-268053 (1994-09-01), None
patent: 08-213337 (1996-08-01), None
patent: 9-205080 (1997-08-01), None
patent: 2001-085408 (2001-03-01), None
patent: 2002-151428 (2002-05-01), None
patent: 2002-151487 (2002-05-01), None
patent: 2002-299319 (2002-10-01), None
patent: 2003-133249 (2003-05-01), None
patent: 2003-209054 (2003-07-01), None
Notification of Transmittal of Translation of the International Preliminary Report on Patentability (Form PCT/IB/338), in connection with PCT/JP2004/013922, dated Jan. 2004.
Translation of International Preliminary Report on Patentability (Form PCT/IPEA/409), in connection with PCT/JP2004/013922, dated Jan. 2004.
Japanese Office Action issued on Sep. 15, 2009 for Japanese Application No. 2003-332482 w/ English translation.

Affiliated with

Also associated with

Rating

Thermal processing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thermal processing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermal processing apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2624143