Thermal monitoring and management of integrated circuits

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C438S018000, C257S048000, C257SE21522

Reexamination Certificate

active

07973544

ABSTRACT:
The invention, in one aspect, provides a semiconductor device (100), including transistors (105), dielectric layers (115, 120) located over the transistors (105), interconnects (122) formed within the dielectric layers (115, 120), and a test structure (130) located adjacent a hot-spot (125) of the semiconductor device (100) and configured to monitor a real-time operational parameter of at least one of the transistors (105) or interconnects (122).

REFERENCES:
patent: 5264377 (1993-11-01), Chesire et al.
patent: 6293698 (2001-09-01), Alvis
patent: 2008/0185584 (2008-08-01), Walter et al.
patent: 2008/0206908 (2008-08-01), Walter

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