Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Reexamination Certificate
2007-12-05
2010-02-23
Porta, David P (Department: 2884)
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
Reexamination Certificate
active
07667200
ABSTRACT:
A thermal microphotonic sensor is disclosed for detecting infrared radiation using heat generated by the infrared radiation to shift the resonant frequency of an optical resonator (e.g. a ring resonator) to which the heat is coupled. The shift in the resonant frequency can be determined from light in an optical waveguide which is evanescently coupled to the optical resonator. An infrared absorber can be provided on the optical waveguide either as a coating or as a plate to aid in absorption of the infrared radiation. In some cases, a vertical resonant cavity can be formed about the infrared absorber to further increase the absorption of the infrared radiation. The sensor can be formed as a single device, or as an array for imaging the infrared radiation.
REFERENCES:
patent: 6489615 (2002-12-01), Bluzer
patent: 6777244 (2004-08-01), Pepper et al.
patent: 6888973 (2005-05-01), Kolodziejski et al.
patent: 2003/0052271 (2003-03-01), Fedder et al.
patent: 2006/0091284 (2006-05-01), Viens et al.
patent: 2007/0110358 (2007-05-01), Hu et al.
Armani et al., “Heavy water detection using ultra-high-Q microcavities,”, Jun. 15, 2006, Optics Letters, vol. 31, No. 12, pp. 1896-1898.
Watts et al., “Thermal Microphotonic Focal Plane Array (TM-FPA) for Uncooled High Sensitivity Thermal Imaging,” May 2007, IEEE Lasers and Electro-Optics, pp. 1-2.
John R. Vig et al, “Microresonator Sensor Arrays”, 1995 IEEE International Frequency Control Symposium, May 31-Jun. 2, 1995, San Francisco, CA, pp. 852-869.
John R. Vig et al, “Uncoiled IR Imaging Array Based on Quartz Microresonators”, Journal of Microelectromechanical Systems, vol. 5, No. 2, 1996, pp. 131-137.
Yoonkee Kim et al, “Experimental Results on a Quartz Microresonator IR Sensor”, 1997 IEEE Ultrasonics Symposium, Oct. 5-8, 1997, Ontario, Canada, 1997, pp. 449-453.
Tomohiro Ishikawa et al, “Performance of 320×240 Uncolled IRFPA with SOI Diode Detectors”, Proceedings of SPIE, vol. 4130 (2000), pp. 152-159.
P. Neuzil et al, “Evaluation of thermal parameters of bolometer devices”, Applied Physics Letters, vol. 80, No. 10, 2002, pp. 1838-1840.
Pavel Neuzil et al, “Micromachined Bolometer With Single-Crystal Silicon Diode as Temperature Sensor”, IEEE Electron Device Letters., vol. 26, No. 5, 2005, pp. 320-322.
D. K. Armani et al, “Ultra-high-Q toroid microcavity on a chip”, Letters to Nature, vol. 421, Feb. 27, 2003, pp. 925-928.
Michael J. Shaw et al, “Fabrication techniques for low loss silicon nitride waveguides”, Proceedings of SPIE Bellingham,WA, vol. 5720, 2005, pp. 109-118.
Junpeng Guo et al, “High-Q microring resonator for biochemical sensors”, Proceedings of SPIE Bellingham,WA, vol. 5728, 2005, pp. 83-92.
Michael R. Watts et al, “Thermal Microphotonic Focal Plane Array (TM-FPA) for Uncooled High Sensitivity thermal Imaging”, Paper presented at IEEE Conference on Lasers and Electro-Optics (CLEO 2007), Baltimore, MD, May 6-11, 2007.
Michael R. Watts et al, “Optical Resonators—Microphotonic Thermal Imaging”, Nature Publishing Group, 2007.
Lentine Anthony L.
Nielson Gregory N.
Shaw Michael J.
Watts Michael R.
Hohimer John P.
Kim Kiho
Porta David P
Sandia Corporation
LandOfFree
Thermal microphotonic sensor and sensor array does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Thermal microphotonic sensor and sensor array, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermal microphotonic sensor and sensor array will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4231793