Thermal micro flow sensor and production method thereof

Details Thermal micro flow sensor and production method thereof Thermal micro flow sensor and production method thereof

1995-08-09

1997-08-12

Chilcot, Richard

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

056567731

ABSTRACT:
A thermal micro flow sensor including a heating wire, said heating wire being made of a material having a resistivity in the range from 3.1.times.10.sup.-7 .OMEGA.m to 2.times.10.sup.-2 .OMEGA.m like polysilicon so that said heating wire has a resistance about 1 k.OMEGA., said heating wire being formed on a semiconductor material so that said heating wire has a thermal isolation structure for isolating said heating wire from said semiconductor substrate.

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