Thermal/mechanical buffer for HgCdTe/Si direct hybridization

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Light responsive structure

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H01L 2714

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active

053650883

ABSTRACT:
A Group II-VI photodetector array 12 is coupled to a silicon readout circuit 14 by means of a thermal/mechanical buffer 16 comprised of a body of material which has a characteristic thermal expansivity which is more similar to that of the thermal expansivity of the Group II-VI material than that of silicon. One suitable material is Al.sub.2 O.sub.3. The buffer has a plurality of conductive vias 18 formed therethrough, each of the conductive vias being "bumped" at opposite ends thereof. The buffer accommodates the differing expansivities of, for example, HgCdTe and silicon, thereby relieving thermally generated stresses with a consequent improvement in the reliability of the resulting hybrid structure.

REFERENCES:
patent: 4597004 (1986-06-01), Longeway et al.
patent: 4692207 (1987-09-01), Bouadma et al.
patent: 4694318 (1987-09-01), Capasso
patent: 4700209 (1987-10-01), Webb

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