Thermal mass flow sensor

Details Thermal mass flow sensor Thermal mass flow sensor

2006-09-19

2006-09-19

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

Thermal type

C073S866500, C073S204270

Reexamination Certificate

active

07107835

ABSTRACT:
A thermal mass flow sensor is disclosed that includes a housing (16) having a first sensor region and a second sensor region, a first thin film temperature sensor (39) formed at the first sensor region and a second thin film temperature sensor (58) formed at the second sensor region. A heating element (40) is arranged to heat the first temperature sensor (39) and a controller (46) is operably connected to the first temperature sensor (39), the second temperature sensor (58) and the heating element (40), and controls a power level to the heating element (40) to maintaining a temperature difference between the first temperature sensor (39) and the second temperature sensor (58). A thin film temperature sensor and a method of using the thermal mass flow sensor are also disclosed.

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