Thermal mass flow sensor

Details Thermal mass flow sensor Thermal mass flow sensor

1992-09-18

1994-01-18

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Proportional

G01F 168, G01F 500

Patent

active

052791548

ABSTRACT:
A vertical flow thermal mass flow sensor for a vertical flow thermal mass flow meter of a vertical flow thermal mass flow controller has a sensor tube having a gas inlet for receiving a gas to be metered. The sensor tube includes a first curved convection trap and a second curved convection trap for preventing convective flow of the gas through the sensor tube. A thermally responsive winding is wound about the sensor tube and is energized from a source of electrical energy. The resistance of the thermally responsive winding is responsive to the rate of flow of the gas through the sensor tube and provides an indication thereof.

REFERENCES:
patent: 2586060 (1952-02-01), Kronberger
patent: 2594618 (1952-04-01), Booth, Jr.
patent: 4056975 (1977-11-01), LeMay
patent: 4686856 (1987-08-01), Vavra et al.

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