Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate
2006-09-19
2006-09-19
Patel, Harshad (Department: 2855)
Measuring and testing
Volume or rate of flow
Thermal type
C073S202500
Reexamination Certificate
active
07107834
ABSTRACT:
A sensing apparatus for use in a mass flow rate sensor for measuring a fluid flow rate includes a main conduit for containing a fluid flow, and a sensor passageway for tapping a portion of the fluid flow from the main conduit at a first location, and returning the portion of the fluid flow to the conduit at a second location. At least one bypass passageway, which may be provided in the form of a tube, is positioned in the main conduit between the first and second locations, and the bypass passageway is provided with non-negligible entrance effects that are substantially equal to entrance effects of the sensor passageway, so that a bypass ratio of the apparatus remains constant. A mass flow rate sensor of the present disclosure accurately measures any type of gas but only requires calibration in only one reference gas.
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Meneghini Paul
Shajii Ali
MKS Instruments Inc.
Patel Harshad
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