Thermal mass flow-meter particularly for gases

Details Thermal mass flow-meter particularly for gases Thermal mass flow-meter particularly for gases

1989-06-22

1990-11-27

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

7320426, 338 28, G01F 168

Patent

active

049727087

ABSTRACT:
A thermal mass flow-meter used in particular for corrosive and hot gases. It includes a flow duct having at least two measuring resistors. At least one of these is arranged in the flow cross-section. At least one heat source is provided in the zone of influence of the measuring resistors; heat source and measuring resistance may be identical. For the purpose of obtaining long-term resistance to corrosion accompanied by great sensitivity as regards response, the measuring resistors consist of a thin-film resistor with a ceramic insulating member, a measuring resistor is connected to a ceramic support member by way of glass solder, and the support member is in turn connected to the flow duct by way of a glass solder element.

REFERENCES:
patent: 2802925 (1957-08-01), Seelen et al.
patent: 3363462 (1968-01-01), Sabin
patent: 3900819 (1975-08-01), Djorup

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