Thermal mass flow meter having a heater and paired...

Details Thermal mass flow meter having a heater and paired... Thermal mass flow meter having a heater and paired...

2007-10-17

2009-11-17

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

Thermal type

Reexamination Certificate

active

07617724

ABSTRACT:
A piping is anchored onto the lower faces of a heater chip and temperature sensor chips by using a thermal conductive adhesive. The heater chip and the temperature sensor chips are coated with a molding resin, and thermal resistance up to an element formed inside thereof is made smallest on a lower face side.

REFERENCES:
patent: 4616505 (1986-10-01), Jouwsma
patent: 6628202 (2003-09-01), McQueen et al.
patent: 6813944 (2004-11-01), Mayer et al.
patent: 6981410 (2006-01-01), Seki et al.
patent: 7444863 (2008-11-01), Sakai
patent: 2005/0028587 (2005-02-01), Baer et al.
patent: 2007/0137297 (2007-06-01), Gehman et al.
patent: 2008/0047339 (2008-02-01), Hasebe
patent: 2008/0148841 (2008-06-01), Sakai
patent: 09-133563 (1997-05-01), None

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