Thermal mass flow meter and method of making same

Details Thermal mass flow meter and method of making same Thermal mass flow meter and method of making same

1985-08-23

1988-12-13

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

29620, 156662, 7320421, G01F 168

Patent

active

047901810

ABSTRACT:
A thermal mass flow meter includes a comb-shaped structure having a plurality closely spaced septa carried from a common spine and disposed within the flow stream to be measured for partitioning the flow therein into a plurality of generally parallel elongated ribbon-shaped flow stream portions. Temperature-dependent fluid flow sensing resistor means is coupled in heat-exchanging relation predominantly with the narrow face of at least one of said ribbon-shaped flow stream portions for measuring the fluid flow. In a preferred embodiment, the comb-shaped flow partitioning structure is fabricated by anisotropically etching the parallel flow channels through the (110) face of diamond cubic material such as silicon. In another embodiment, a thermal loading member is disposed in heat-exchanging relation with the temperature dependent fluid flow sensing resistor means for thermally loading same and pushing the critical flow rate up to a higher flow to allow operation of the flow sensor in one mode of operation over a wider range of flow rates.

REFERENCES:
patent: 3931736 (1976-01-01), Olmstead
patent: 4345465 (1982-08-01), Gruner et al.
patent: 4373387 (1983-02-01), Nishimura et al.
patent: 4448070 (1984-05-01), Ohyama et al.
patent: 4494406 (1985-01-01), Komons et al.
patent: 4498337 (1985-02-01), Gruner
patent: 4502339 (1985-05-01), Horn
patent: 4542650 (1985-09-01), Renken et al.
patent: 4624137 (1986-11-01), Johnson et al.
patent: 4627279 (1986-12-01), Ohta et al.

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