Measuring and testing – Volume or rate of flow – Thermal type
Patent
1983-08-26
1985-09-24
Goldstein, Herbert
Measuring and testing
Volume or rate of flow
Thermal type
338319, G01F 168
Patent
active
045426503
ABSTRACT:
The flow meter (10), particularly useful in monitoring flow in semiconductor manufacturing operations, measures mass flow rate of fluids and is fabricated by providing spaced webs (16) deposited on a silicon substrate (11) and fluid flow grooves (13) etched across a substrate surface and extending under the spaced webs. The webs 16 include a low thermal conductivity layer deposited in spaced aligned portions of the substrate and electrically resistive pathways deposited on the layer portions (61). The webs act as temperature sensors and/or heaters. Heat is added to the flowing fluid and a differential temperature is measured on a bridge circuit as is known in the art to measure flow rate. A cover (12) has etched grooves (14a) which match the grooves (13) of the substrate to form a fluid passageway in which the web bisects the passageway forming an "air-foil" like bridging member extending completely across (or cantilevered across) in transverse relation to the flat sides of the substrate on either side of the groove. Normally multiple series of webs and multiple grooves are employed to provide redundancy of the flow meter channels in the event contaminants plug a particular channel.
REFERENCES:
patent: 3996799 (1976-12-01), van Putten
patent: 4343768 (1982-08-01), Kimura
patent: 4471674 (1984-09-01), Jerman et al.
patent: 4478076 (1984-10-01), Bohrer
patent: 4478077 (1984-10-01), Bohrer et al.
LeMay Dan B.
Renken Wayne G.
Caserza Steven F.
Goldstein Herbert
Innovus
MacDonald Thomas S.
MacPherson Alan H.
LandOfFree
Thermal mass flow meter does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Thermal mass flow meter, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermal mass flow meter will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1608499