Thermal isolation structures for microactuators

Details Thermal isolation structures for microactuators Thermal isolation structures for microactuators

1994-08-24

1996-06-25

Lee, Kevin

Valves and valve actuation

Heat or buoyancy motor actuated

25112901, 251368, 60528, 60529, F16K 3102, F03G 706

Patent

active

055292798

ABSTRACT:
A microactuator preferably in the form of a microminiature valve for controlling the flow of a fluid carried by a flow channel includes a first substrate having a thermally-actuated member selectively operated by a thermal actuator such that the first substrate thereby develops thermal energy, and a second substrate having opposed first and second major surfaces. The second substrate is attached to the first substrate at the first major surface. The second major surface defines an isolation cell for enclosing a volume when the second substrate is attached to the support to thereby reduce the thermal mass of the microactuator and to thermally isolate the first substrate from the support.

REFERENCES:
patent: 4581624 (1986-04-01), O'Connor
patent: 5050838 (1991-09-01), Beatty, et al.
patent: 5058856 (1991-10-01), Gordon, et al.
patent: 5069419 (1991-12-01), Jerman
patent: 5161774 (1992-11-01), Engelsdorf et al.
patent: 5333831 (1994-08-01), Barth, et al
patent: 5344117 (1994-09-01), Trah et al.

Affiliated with

Also associated with

Rating

Thermal isolation structures for microactuators does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thermal isolation structures for microactuators, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermal isolation structures for microactuators will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2183952