Thermal isolation plate for probe card

Details Thermal isolation plate for probe card Thermal isolation plate for probe card

1998-09-30

2000-06-27

Brown, Glenn W.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324754, 29829, G01R 3102, G01R 104

Patent

active

060811102

ABSTRACT:
A thermal isolation plate for a probe card comprises a stiff, generally annular plate made of a metal having good thermal conductivity. One surface of the plate has a low emissivity and the opposite surface has a low absorptivity. Preferably the surface of low absorptivity is a highly polished surface.

REFERENCES:
patent: 3866119 (1975-02-01), Ardezzone et al.
patent: 4721831 (1988-01-01), Vora
patent: 4812740 (1989-03-01), Shutts
patent: 4963225 (1990-10-01), Lehman-Lamer
patent: 5623214 (1997-04-01), Pasiecznik, Jr.
patent: 5642054 (1997-06-01), Pasiecznik, Jr.

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