Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate
2007-10-09
2007-10-09
Patel, Harshad (Department: 2855)
Measuring and testing
Volume or rate of flow
Thermal type
Reexamination Certificate
active
11299118
ABSTRACT:
A flow sensor system includes a plurality of flow sensor chips, wherein each flow sensor chip among the plurality of flow sensor chips comprises a substrate, a heater element, a heater control circuit, and flow sensor component formed on the substrate, wherein the heater element is disposed separately from the heater control circuit on the substrate, wherein the heater control circuit is thermally isolated from the heater element and the flow sensor component. Additionally, an air gap can be formed between each sensor chip among the plurality of flow sensor chips, wherein the plurality of flow sensor chips comprises a flow sensor system in which each of the flow sensor chips are separated from one another by the air gap formed therebetween in order to reduce output distortion, response time, warm-up time, drift and noise associated with the plurality of flow sensor chips.
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Digital CMOS Sensor Chips for Media-Isolated Liquid Flow Sensing, U. Kanne, Sensirion AG, Zurich, Switzerland, May 2003.
Gehman Richard W.
Marchini Michael G.
Murray Martin G.
Honeywell International , Inc.
Lopez Kermit D.
Ortiz Luis M.
Patel Harshad
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