Thermal ink jet printhead with low resistance connection to...

Incremental printing of symbolic information – Ink jet – Ejector mechanism

Reexamination Certificate

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C347S058000

Reexamination Certificate

active

07134745

ABSTRACT:
An ink jet printhead which has a plurality of nozzles3and a bubble forming chamber7corresponding to each nozzle respectively. At least one heater element10disposed in each bubble forming chamber7to heat a bubble forming liquid11to a temperature above its boiling point to form a gas bubble12therein. The generation of the bubble12causes the ejection of a drop16of an ejectable liquid (such as ink) through an ejection aperture5in each nozzle3, to effect printing. Integrated circuit metalization layers corresponding to each of the nozzles supply electrical energy to the heater14. The heater14and the integrated circuit metalization layers23are substantially planar and at least partially overlapping, the metallization layers electrically connected to the heater electrodes15by vias, the cross sectional area of all the vias being greater than 50% of the surface area of one side of the heater14. A relatively large number of vias lowers the electrical resistance between the electrodes and the CMOS metalization layers. Lower resistance reduces the power losses and improves the operating efficiency of the printhead.

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The Fabrication and Reliability Testing of Ti/TiN Heaters, P. Demoor, Proceedings of SPIE, Micromachining and Microfabrication Process Technology V, vol. 3874, pp. 284-294. Please note, this document was provided in copending U.S. Appl. No. 10/303,348.
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