Thermal ink jet printhead with internally fed ink reservoir

Details Thermal ink jet printhead with internally fed ink reservoir Thermal ink jet printhead with internally fed ink reservoir

1989-02-02

1990-02-06

Hartary, Joseph W.

Recorders

Markers and/or driving means therefor

With ink supply to marker

156644, 156647, G01D 1516, B41J 304

Patent

active

048991783

ABSTRACT:
An improved thermal ink jet printhead and method of fabrication thereof is disclosed for the type formed by the mating and bonding of first and second substrates. The first substrate is silicon with {100} crystal plane surfaces and has anisotropically etched in one surface thereof a linear series of through recesses together with opposing outer shallow recesses and a plurality of parallel, elongated grooves. The second substrate has a plurality of heating elements and addressing electrodes patterned on one surface thereof. The through recesses with opposing outer shallow recesses serve as a segmented ink reservoir and the elongated grooves serve as ink channels. Adjacent recesses of the segmented reservoir are separated by the dividing walls. The spacing between vias having a dimension which will permit complete undercutting. The undercutting provides ink flow paths. In one embodiment, the shallow recesses of the segmented reservoir are internally fed through the undercut walls. The dividing walls strengthen the printhead and concurrently reduce the effects of angular misalignment between mask and first substrate crystal planes. The shallow internally fed segments of the reservoir reduce the number of through etched reservoir segments and permit the use of smaller gaskets to seal the interface between the printhead and an external ink supply.

REFERENCES:
patent: Re32572 (1988-01-01), Hawkins et al.
patent: 4638337 (1987-01-01), Torpey et al.
patent: 4774530 (1988-09-01), Hawkins
patent: 4786357 (1988-11-01), Campanelli et al.
patent: 4829324 (1989-05-01), Drake

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