Thermal ink jet printhead with increased heater resistor control

Details Thermal ink jet printhead with increased heater resistor control Thermal ink jet printhead with increased heater resistor control

1998-12-07

2000-11-14

Smith, Matthew

Semiconductor device manufacturing: process

Manufacture of electrical device controlled printhead

257380, 257379, 347 62, 347 65, H01L 2100

Patent

active

061469149

ABSTRACT:
An improved method is disclosed for forming heater elements for an ink jet printhead. The resistance is more closely controlled by doping a central heater region which is formed relatively thinner than the heavily doped heater regions which are used as the gate and contact areas. The thinner central region can doped relatively heavy in order to more accurately adjust the heater resistance.
In another embodiment, the thin layer is amorphous silicon rather than the polysilicon to increase the latitude of the energy input.

REFERENCES:
patent: 4947192 (1990-08-01), Hawkins et al.
patent: 5639386 (1997-06-01), Burke et al.
patent: 5706041 (1998-01-01), Kubby
patent: 5742307 (1998-04-01), Watrobski et al.
patent: 5751315 (1998-05-01), Burke et al.
patent: 5969392 (1999-08-01), Hawkins et al.

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