Thermal ink-jet printhead with a suspended heating element in ea

Details Thermal ink-jet printhead with a suspended heating element in ea Thermal ink-jet printhead with a suspended heating element in ea

1997-09-15

1998-12-22

Breneman, R. Bruce

Etching a substrate: processes

Forming or treating thermal ink jet article

H01L 21302

Patent

active

058514120

ABSTRACT:
In a thermal ink-jet printhead, a set of heating elements are formed in the main surface of a semiconductor chip. Channels are formed by etching within the semiconductor chip underneath each of the heating elements, thereby exposing two main sides of each heating element within each ejector. Because two main surfaces of the heating element are accessible to liquid ink in each ejector, efficiency and thermal characteristics of the printhead are improved.

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