Thermal ink jet printhead

Details Thermal ink jet printhead Thermal ink jet printhead

1983-05-25

1985-04-23

Hartary, Joseph W.

Recorders

Markers and/or driving means therefor

With ink supply to marker

G01D 1518

Patent

active

045132984

ABSTRACT:
A protective passivation structure is provided for a thermal ink jet printing head which employs a resistive heating element formed of phosphorus-diffused silicon. The passivation structure includes a layer of silicon nitride over the heating element with a layer of silicon carbide over the silicon nitride layer. The nitride exhibits good adhesion to the underlying silicon as well as good thermal conductivity. The carbide has exceptionally good wear and hardness qualities against ink bubble cavitation as well as adhering well to the nitride.

REFERENCES:
patent: 4335389 (1982-06-01), Shirato
patent: 4429321 (1984-01-01), Matsumoto
patent: 4438191 (1984-03-01), Cloutier

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