Thermal ink drop on demand devices on a single chip with vertica

Details Thermal ink drop on demand devices on a single chip with vertica Thermal ink drop on demand devices on a single chip with vertica

1990-04-02

1991-09-03

Hartary, Joseph W.

Recorders

Markers and/or driving means therefor

With ink supply to marker

298901, 338308, 357 51, B41J 205

Patent

active

050458701

ABSTRACT:
This application discloses a novel method to integrate thermal drop on demand ink jet devices and related pulse driver circuitry for chips used in thermal ink jet printers. This integrated printhead chip is made by first fabricating on the substrate the driver pulse circuitry through the last level of metallization. Once complete, a low temperature (<400 C.) CVD oxide is deposited and planarized. It is of sufficient thickness (3 to 4 microns) to insure a good thermal barrier between the pulse circuitry and the thermal inkjet devices. After planarization, the resistor material is deposited and patterned. Openings are then patterned to the inputs and outputs of the pulse driver circuitry. Aluminum copper metallurgy is deposited and patterned to connect the resistor to the pulse driver output and define the heater resistor areas. Inorganic and organic barrier layers are applied and patterned to protect the resistor material and interconnecting metallurgy from the corrosive effects of the ink. After testing, ink holes are drilled and the wafer is diced and nozzle plates are attached to the chips. Thus, this "on chip" driver integration enables the pulse driver circuitry to be moved to the thermal ink jet printhead. It offers advantages over other methods of ink jet/driver device integration by the chip footprint the same without decreasing the dimensions of the respective devices.

REFERENCES:
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patent: 3984843 (1976-10-01), Kuhn
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patent: 4429321 (1984-01-01), Matsumoto
patent: 4438191 (1984-03-01), Cloutier et al.
patent: 4532530 (1985-07-01), Hawkins
patent: 4719477 (1988-01-01), Hess
patent: 4862197 (1989-08-01), Stoffer
Hewlett Packard Journal, entitled "The Second-Generation Thermal Ink Jet Structure", by Askeland et al., Aug. 1988, pp. 28-31.
Hewlett Packard Journal, entitled "High-Volume Microassembly of Color Thermal Inkjet Printheads and Cartridges", by Boeller et al, Aug. 1988, pp. 32-40.
Hewlett Packard Journal, entitled "Design and Development of a Color Thermal Inkjet Print Cartridge" by Baker et al., Aug. 1988, pp. 6-15.
Hewlett Packard Journal, Aug. 1988, entitled "Ink Retention in a Color Thermal Inkjet Pen", pp. 41-44 by Erturk et al.
Hewlett Packard Journal, Aug. 1988, entitled "Ink and Media Development for the HP Paintjet Printer", pp. 45-50 by Palmer et al.
Hewlett Packard Journal, Aug. 1988, entitled "Color Thermal Inkjet Printer Electronics" by Hollis et al., pp. 51-56.
Hewlett Packard Journal, Aug. 1988, entitled "Development of a Color Graphics Printer" by Smith et al., pp. 16-21.
Hewlett Packard Journal, Aug. 1988, entitled "Mechanical Design of a Color Graphics Printer" by Ta et al., pp. 21-27.

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