Thermal infrared detector having a small thermal time...

Details Thermal infrared detector having a small thermal time... Thermal infrared detector having a small thermal time...

2007-02-20

2007-02-20

Porta, David (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

C250S338300, C250S338400, C250S339020, C250S330000, C250S332000

Reexamination Certificate

active

10697155

ABSTRACT:
In an area of a diaphragm5as an infrared photosensitive portion of a thermal infrared detector, a fourth dielectric protective film8cis etched and reduced in thickness to form a fifth dielectric protective film8dso that the thickness of the diaphragm5as a whole is reduced. With this structure, the thermal capacity of the diaphragm5is decreased and the thermal time constant is reduced. This enables the thermal infrared detector to be operated at a high frame rate. A bolometer thin film7is formed throughout an entire surface of the diaphragm5.

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patent: 2001-215151 (2001-08-01), None

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