Thermal infrared detector and infrared focal plane array

Details Thermal infrared detector and infrared focal plane array Thermal infrared detector and infrared focal plane array

2006-02-28

2006-02-28

Gabor, Otilia (Department: 2878)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

C250S338400

Reexamination Certificate

active

07005644

ABSTRACT:
A thermal infrared detector includes a substrate; a temperature sensor having electrical characteristics changed in accordance with changes in temperature caused by infrared absorption; heat-insulating supporting legs supporting and thermally insulating the temperature sensor and serving as signal lines for reading out electrical signals from the temperature sensor; and an infrared absorption layer in thermal contact the temperature sensor. Each of the temperature sensor, the heat-insulating supporting legs, and the infrared absorption layer is in a different plane and the planes are spatially separated from each other.

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Ishikawa et al., “Low-cost 320 x 240 Uncooled IRFPA Using Conventional Silicon IC Process”,SPIE Conference on Infrared Tech. Applications XXV,Apr. 1999, pp. 556-564, vol. 3698, FL.

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