Thermal infrared detecting device capable of detecting infrared

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive

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2503383, G01J 520

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active

060343699

ABSTRACT:
In a thermal infrared detecting device for detecting infrared rays having a specific wavelength, a first pixel (501) has an infrared absorber (544) and a first reflecting film (533) which have a first surface and a second surface, respectively. The first surface and the second surface are remoted from each other by a first distance equal to {.lambda.*(2m-1)/4*n1}, where .lambda. is representative of the specific wavelength; m, a natural number; and n1, a practical refractive index between the infrared absorber and the first reflecting film. The infrared absorber is included in a first upper portion (503) together with a first thermo-resistive converter (542). The first reflecting film is formed on a first lower portion which is distant from the first upper portion. A second pixel (502) has a second upper portion (504) which is located in parallel with the first upper portion and which has a second thermo-resistive converter (542). The second pixel has a second lower portion which is extended from the first lower portion and which is distant from the second upper portion.

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Kanno et al., "Uncooled Infrared Focal Plane Array Having 128 .times. 128 Thermopile Detector Elements" SPIE vol. 2269, pp. 450-459, Jun. 1994.
Ueno et al, "Monolithic Uncooled Infrared Image Sensor with 160 .times. 120 Pixels", Jul. 1995, pp. 636-643, SPIE vol. 2552.

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