Thermal imaging system with a monolithic focal plane array and m

Radiant energy – Infrared-to-visible imaging – Including detector array

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250331, G01J 502, G02F 113

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055127487

ABSTRACT:
A thermal imaging system (10) contains a focal plane array (30) including a plurality of thermal sensors (32) mounted on a substrate (62). Each thermal sensor (32) includes a film layer (34) of infrared sensitive material which is both electronically and thermally isolated from the associated integrated circuit substrate (62). An image may be formed on the film layer (34) in response to infrared radiation from a scene (12). Electromagnetic radiation (22) from a source (visible light or near infrared) (20) is used to reproduce or transfer the image from the thermal sensors (32) onto the first surface (68) of the substrate (62). A thermoelectric cooler/heater (66) may be provided to optimally adjust the temperature of the substrate (62) to improve overall image quality.

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