Thermal fluid flow sensing method and apparatus for sensing flow

Details Thermal fluid flow sensing method and apparatus for sensing flow Thermal fluid flow sensing method and apparatus for sensing flow

1986-08-04

1988-03-29

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

System

73204, G01F 700, G01F 168

Patent

active

047335599

ABSTRACT:
Miniature thermal fluid flow sensors of the airfoil type are made in batch form by forming the thermal fluid flow sensors on a thin sheet of material and bonding the sheet over an array of duct structures and dicing the individual sensors and duct structures apart. In one thermal flow sensor configuration, a flow heater is dispsoed inbetween first and second thermal flow sensors in heat exchanging relation therewith. A third thermal flow sensor is disposed upstream of the others out of heat exchanging relation with the heater for operation of the heater at a certain temperature above that sensed by the third sensor. In the low flow regime, flow is measured by the difference between the outputs of the first and second sensors, whereas in the high flow regime, the power required to maintain the temperature of the heater serves as a measure of the flow.

REFERENCES:
patent: 2972885 (1961-02-01), Laub
patent: 3352154 (1967-11-01), Djorup
patent: 3992940 (1976-11-01), Platzer, Jr.
patent: 4501144 (1985-02-01), Higashi et al.
Van Riet et al., "Integrated Direction-Sensitive Flowmeter", in Electronic Newsletter, vol. 12, #24, 11/76, pp. 647, 648.
Huijsing et al., "Monolithic Integrated Direction-Sensitive Flow Sensor", in IEEE Trans. on Elec. Devices, vol. ED-29, #1, 1/82, pp. 133-136.

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