Thermal flowmeter having a laminate structure

Measuring and testing – Volume or rate of flow – Thermal type

Reexamination Certificate

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Details

C073S202500

Reexamination Certificate

active

06928865

ABSTRACT:
The present invention relates to a thermal flowmeter capable of sensing a flow rate in either direction, having a linear output characteristic, and producing a stable output without impairing the response characteristic. In the thermal flowmeter, a laminate is fitted in a channel space formed in a body, forming a main channel. The laminate includes a mesh sheet so that a mesh portion is provided between the main channel and a sensor channel. A measurement chip is provided with an upstream temperature sensing resistor, a downstream temperature sensing resistor, a heating resistor, and a fluid temperature sensing resistor. By an electric circuit, the heating resistor and the fluid temperature sensing resistor are controlled to provide a constant temperature difference. Accordingly, the flow rate of a fluid under measurement is measured based on a temperature difference between the upstream and downstream temperature sensing resistors.

REFERENCES:
patent: A 2000-146652 (2000-05-01), None
patent: A 2001-165734 (2001-06-01), None
patent: A 2002-5717 (2002-01-01), None
patent: A 2002-168669 (2002-06-01), None
patent: A 2003-194607 (2003-07-01), None
patent: A 2003-194608 (2003-07-01), None

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