Thermal flow sensor

Details Thermal flow sensor Thermal flow sensor

1988-12-07

1990-04-03

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

049129740

ABSTRACT:
A thermal flow sensor has a housing through the inside of which a fluid is allowed to flow, and a supporting substrate disposed within and substantially in the center of the housing. A flat-plate shaped thermosensitive resistor and a fluid temperature sensor are provided on the supporting substrate. The thermosensitive resistor is disposed on the supporting substrate by being supported by a plurality of slender supporting members which support end portions of the resistor in such a manner as to provide narrow portions of a heat transferring path. The sensor detects flow rate with a good sensibility, while preventing any reduction in high levels of measuring sensibility and responsibility that are possessed by a small thermosensitive resistor.

REFERENCES:
patent: 4373387 (1983-02-01), Nishmura et al.
patent: 4393697 (1983-07-01), Sato et al.
patent: 4425792 (1984-01-01), Kohama et al.
patent: 4498337 (1985-02-01), Gruner
patent: 4513615 (1985-04-01), Sato et al.
patent: 4677850 (1987-07-01), Miura et al.
patent: 4682496 (1987-07-01), Miura et al.

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