Thermal flow meter, thermal flow meter control method, and...

Measuring and testing – Volume or rate of flow – Thermal type

Reexamination Certificate

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Reexamination Certificate

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07814785

ABSTRACT:
A thermal flow meter corrects flow rate detection errors produced by vaporization of liquid phase components included in a gas to be measured. The thermal flow meter includes a correction circuit500that applies respectively different predetermined voltages to heating resistors consisting of first heating resistor Rh1and second heating resistor Rh2of a sensor element disposed in the gas to be measured to set a first temperature state and a second temperature state, calculates a first flow rate value Q1of the gas to be measured in the first temperature state and a second flow rate value Q2of the gas to be measured in the second temperature state, and calculates a flow rate correction value ΔQ based on a ratio (Q1/Q2) between the first flow rate value and second flow rate value or a fourth-power value (Q1/Q2)4of the ratio to correct a flow rate of the gas to be measured.

REFERENCES:
patent: 7726187 (2010-06-01), Sukegawa et al.
patent: 2008/0295590 (2008-12-01), Sukegawa et al.
patent: 2009/0223495 (2009-09-01), Ohata et al.
patent: 59-136620 (1984-08-01), None
patent: 2007-285756 (2007-01-01), None
patent: 2007-248136 (2007-09-01), None
patent: 2008-032501 (2008-02-01), None

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