Thermal fixture for testing integrated circuits

Details Thermal fixture for testing integrated circuits Thermal fixture for testing integrated circuits

1988-01-11

1988-12-13

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, G01R 3102

Patent

active

047913649

ABSTRACT:
A device for individually testing semiconductor integrated circuits in wafer form at elevated and/or reduced temperatures include a fixture body for connection to a conventional probing device. The fixture body has an open-ended aperture to permit visual inspection of a circuit being tested, a plenum to receive pressurized gas at a selected temperature(s), and nozzles to direct the gas from the plenum into the aperture for ejection onto the surface of the integrated circuit being tested to rapidly bring that circuit to the temperature of the gas.

REFERENCES:
patent: 3039604 (1962-06-01), Bickel et al.
patent: 3710251 (1973-01-01), Hagge et al.
patent: 3979671 (1976-09-01), Meeker et al.
patent: 4115736 (1978-09-01), Tracy
patent: 4520312 (1985-05-01), Tarng et al.
patent: 4528504 (1985-07-01), Thornton, Jr. et al.
patent: 4588092 (1986-05-01), Moechnig et al.
Oktay et al.; "Counter-Flow Air . . . "; IBM Tech. Dis. Bull.; vol. 22; No. 2; Jul. 1979; pp. 589-590.

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