Thermal fixture for testing an integrated circuit

Details Thermal fixture for testing an integrated circuit Thermal fixture for testing an integrated circuit

1992-04-10

1994-07-19

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

165 804, G01R 3102, H01L 2344

Patent

active

053312732

ABSTRACT:
Apparatus for controlling the temperature of an integrated circuit. A thelly conductive block has a vacuum passage connected to a vacuum pump for clamping the block to the top of an integrated circuit housing without mechanical clamping structures. A closed fluid loop including a circulating pump, heater and chiller modulate the temperature of a fluid passing through the conductive block thereby to control its temperature and the temperature of the integrated circuit independently of any other integrated circuit.

REFERENCES:
patent: 3710251 (1973-01-01), Hagge et al.
patent: 4791364 (1988-12-01), Kufis et al.
patent: 4839587 (1989-06-01), Flatley et al.
patent: 5001423 (1991-03-01), Abrami et al.
patent: 5034688 (1991-07-01), Moulene et al.
patent: 5084671 (1992-01-01), Miyata et al.
patent: 5097207 (1992-03-01), Blanz

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