Thermal field emmission electron gun

Details Thermal field emmission electron gun Thermal field emmission electron gun

1995-04-19

1996-07-16

Berman, Jack I.

Radiant energy

Ion generation

Field ionization type

313336, 313310, 313311, H01J 130, H01J 148, H01J 37073

Patent

active

055369448

ABSTRACT:
A thermal field emission electron gun has a thermal field emission cathode and a suppressor electrode wherein the thermal field emission cathode comprises a single crystal tungsten needle of an axis direction of <100> and a coating layer composed of zirconium and oxygen, and the suppressor electrode is composed of either titanium or an alloy including titanium as the major component, of which hydrogen content is 60 ppm or less. Electron beams can be stably obtained with good reproducibility in a short time.

REFERENCES:
patent: 3766427 (1973-10-01), Coates et al.
patent: 4379250 (1983-04-01), Hosoki et al.
patent: 5449968 (1995-09-01), Terui et al.
Thermal Field Emitter Operating Instructions, Jan. 1987, FEI Company, pp. 1-23.

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