Radiant energy – Ion generation – Field ionization type
Reexamination Certificate
2007-03-26
2009-08-11
Nguyen, Kiet T (Department: 2881)
Radiant energy
Ion generation
Field ionization type
C315S001000, C315S094000
Reexamination Certificate
active
07573046
ABSTRACT:
One embodiment relates to a thermal field emission electron gun. The electron gun includes a high-vacuum chamber, a thermal field emission cathode including a filament and a tip, a suppressor electrode, an extraction electrode, and a high-voltage power source. The high-voltage power source is coupled to the filament and to the suppressor and extraction electrodes such that the suppressor electrode is at a negative voltage potential in relation to the filament and the extraction electrode is at a positive voltage potential in relation to the filament. A current-limiting resistor is electrically coupled in series with the suppressor electrode. Applicant has determined that such a current-limiting resistor substantially reduces undesirable discharges and improve the reliability and lifetime of the electron gun. Other embodiments, aspects and features are also disclosed.
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KLA-Tencor Technologies Corporation
Nguyen Kiet T
Okamoto & Benedicto LLP
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