Thermal field emission electron gun

Details Thermal field emission electron gun Thermal field emission electron gun

1997-11-12

1999-10-05

O'Shea, Sandra

Electric lamp and discharge devices

Electrode and shield structures

Point source cathodes

313351, 313346R, 313346DC, H01J 116

Patent

active

059629614

ABSTRACT:
There is disclosed a long-lived thermal field emission electron gun for use in a scanning electron microscope. The gun has a tungsten tip. The surface of this tip is coated with zirconium, zirconium oxide, titanium or titanium oxide. A wire member is mounted above the front end of the tungsten tip to prevent the coating of zirconium or other material from slipping off.

REFERENCES:
patent: 5034612 (1991-07-01), Ward et al.
patent: 5616926 (1997-04-01), Shinada et al.
patent: 5763880 (1998-06-01), Nisiyama et al.
patent: 5838096 (1998-11-01), Shinada et al.
"Operational experience with zirconiated T-F emitters", J.E. Wolfe, J. Vac. Sci. Technol. 16(6), Nov./Dec. 1979, pp. 1704-1708.

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