Coherent light generators – Particular pumping means – Electrical
Reexamination Certificate
2005-09-27
2009-06-02
Harvey, Minsun (Department: 2828)
Coherent light generators
Particular pumping means
Electrical
C372S087000, C372S088000
Reexamination Certificate
active
07542502
ABSTRACT:
A corona-discharge type, preionizer assembly for a gas discharge laser is disclosed. The assembly may include an electrode and a hollow, dielectric tube that defines a tube bore. In one aspect, the electrode may include a first elongated 0o conductive member having a first end disposed in the bore of the tube. In addition, the electrode may include a second elongated conductive member having a first end disposed in the bore and spaced from the first end of the first conductive member. For the assembly, the first and second conductive members may be held at a same voltage potential.
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Steiger Thomas D.
Ujazdowski Richard C.
Cymer Inc.
Harvey Minsun
Hillman Matthew K.
King Joshua
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