Thermal distortion compensated projection exposure method and ap

Details Thermal distortion compensated projection exposure method and ap Thermal distortion compensated projection exposure method and ap

1995-05-22

1996-12-03

Braun, Fred L.

Photocopying

Projection printing and copying cameras

Step and repeat

G03B 2742, G03B 2752

Patent

active

055813240

ABSTRACT:
A projection exposure apparatus has a light source for emitting illumination light, an illumination optical system for illuminating a mask, on which a predetermined pattern is formed, with the illumination light, and a projection optical system for forming an image of the pattern on a photosensitive substrate, and images the image of the pattern on the photosensitive substrate in a predetermined imaging state. The apparatus also includes a temperature measurement sensor for measuring a change in temperature of the mask, a control system for calculating the change amount of the imaging state caused by the change in temperature, and a correction system for correcting the change in imaging state.

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