Thermal diffusion fluid flow sensor

Details Thermal diffusion fluid flow sensor Thermal diffusion fluid flow sensor

1984-08-29

1986-03-18

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

By measuring transit time of tracer or tag

73204, G01F 168, G01P 510

Patent

active

045760500

ABSTRACT:
A miniature solid state fluid flow sensor has a low diffusivity substrate, such as a polymer film, which is optionally mounted on a thermally conductive base. A resistor strip on the substrate is connected to an electrical oscillator and thus emits thermal waves which are propagated through the fluid at a rate dependent on a fluid flow component perpendicular to the strip. A thermoelectric detector, spaced from one side or each side of the strip, senses the thermal waves; and detector circuitry determines the time or phase shift due to fluid flow.

REFERENCES:
patent: 3922912 (1975-12-01), Badbury et al.
patent: 4332157 (1982-06-01), Zemel et al.
patent: 4345465 (1982-08-01), Gruner et al.
patent: 4373386 (1983-02-01), Schuddemat et al.
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 4498337 (1985-02-01), Gruner

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