Thermal desorption gas spectrometer

Details Thermal desorption gas spectrometer Thermal desorption gas spectrometer

1994-03-22

1996-06-18

Anderson, Bruce C.

Radiant energy

Ionic separation or analysis

With sample supply means

250281, 2504431, H01J 4900, B01D 5944

Patent

active

055280323

ABSTRACT:
In a thermal desorption gas spectrometer in which samples placed on a sample stage within a vacuum chamber are heated by irradiation with infrared rays, and in which mass is analyzed by detecting desorbed gas by means of a mass spectrometer, there is provided a processing circuit which takes in the electrical signal that is output by the mass spectrometer. The intensity of this signal is continuously recorded, for each mass of a detected substance, as a function of temperature (or of elapsed time) from the start of heating of the sample to the temperature at which the amount of desorbed gas from the sample becomes extremely small. This signal intensity is integrated with respect to temperature (or time) for each mass. The absolute value of the number of molecules can be obtained by comparing these integrated values with the value obtained for a standard sample. A single reference can be set for these measurement results, and an absolute value can be given for the measurement results for each kind of gas that desorbs in the vacuum.

REFERENCES:
patent: 4663297 (1987-05-01), Yates et al.
patent: 4877584 (1989-10-01), Yates et al.
Yuko Hirohata, "Characterization Of Gas Desorption From Solid Samples With Small Size by TDS", Faculty of Engineering, Hokkaido University, 1990, pp. 34-41, English Translation of Section 3.
N. Hirashita et al, "Studies Of Quantitative Analysis Of Evolved Gas Using Thermal Desorption Spectroscopy", Abstracts of the Japanese Society of Applied Physics, 1993, Full English Translation.
Takahagi, "Evaluation of Hydrogen-Terminated SI Surface", EFM-92-37, 1992, pp. 31-40, English Trans. of Section 2.2.
English Abstract of Japan Application No. 4-48254 of Hinaga for Device and Method for Detecting Desorbed Gas Feb. 1992.

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