Thermal decomposition cell

Details Thermal decomposition cell Thermal decomposition cell

1991-06-03

1993-06-22

Reynolds, Bruce A.

Industrial electric heating furnaces

Electron beam furnace device

373 11, 373109, 373111, 118719, 118730, 156612, 427252, 4272551, H01J 37305

Patent

active

052220745

ABSTRACT:
A thermal decomposition cell for producing a molecular beam from a material gas, includes: a crucible maintained at a given temperature necessary for thermal decomposition of the material gas which is effused in the crucible in a given direction; and a thermal decomposition baffle provided in the crucible and heated to a given temperature necessary for thermal decomposition of the material gas for producing the molecular beam by thermal-decomposing of the material gas such that the material gas is baffled in substantially all directions, the thermal decomposition baffle being made of a given metal to cause the thermal decomposition of the material gas. The thermal decomposition baffle may comprise a fiber or a cloth made of the metal loaded in the crucible. The thermal decomposition baffle may comprise a plurality of different sized rooms made of the given metal, each of said rooms having fine holes to allow the material gas to pass therethrough, and successively arranged in such a manner that said material gas moves from one room toward the other adjacent thereto.

REFERENCES:
patent: 4674442 (1987-06-01), Blum
patent: 4699083 (1987-10-01), Huet et al.
patent: 4792378 (1988-12-01), Rose et al.
patent: 4986216 (1991-01-01), Ohmori et al.
patent: 4990374 (1991-02-01), Keeley et al.

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